Determination of frequency response of MEMS microphone from sound field measurements using optical phase-shifting interferometry method
2009 ◽
Vol 10
(5)
◽
pp. 5-10
◽
Keyword(s):
2019 ◽
Vol 888
◽
pp. 43-46
Keyword(s):
Keyword(s):
2000 ◽
Vol 47
(10)
◽
pp. 1681-1691
◽
2000 ◽
Vol 47
(10)
◽
pp. 1681-1691
◽
Keyword(s):