Design and performance of the classifier of the projectile body surface defect recognition system

2016 ◽  
Author(s):  
Wenfeng Guo ◽  
Zhigang Jiao ◽  
Degang Liang
2021 ◽  
Vol 50 ◽  
pp. 101392
Author(s):  
Yucheng Wang ◽  
Xinyu Li ◽  
Yiping Gao ◽  
Lijian Wang ◽  
Liang Gao

Author(s):  
Daniel Schurz ◽  
Warren W. Flack

Advances in micromachining (MEMS) applications such as optical components, inertial and pressure sensors, fluidic pumps and radio frequency (RF) devices are driving lithographic requirements for tighter registration, improved pattern resolution and improved process control on both sides of the substrate. Consequently, there is a similar increase in demand for advanced metrology tools capable of measuring the Dual Side Alignment (DSA) performance of the lithography systems. There are a number of requirements for an advanced DSA metrology tool. First, the system should be capable of measuring points over the entire area of the wafer rather than a narrow area near the lithography alignment targets. Secondly, the system should be capable of measuring a variety of different substrate types and thicknesses. Finally, it should be able to measure substrates containing opaque deposited films such as metals. In this paper, the operation and performance of a new DSA metrology tool is discussed. The UltraMet 100 offers DSA registration measurement at greater than 90% of a wafer’s surface area, providing a true picture of a lithography tool’s alignment performance and registration yield across the wafer. The system architecture is discussed including the use of top and bottom cameras and the pattern recognition system. Experimental data is shown for tool performance in terms of repeatability and reproducibility over time. The requirements for tool accuracy and methods to establish accuracy to a NIST traceable standard are also discussed.


Sensors ◽  
2020 ◽  
Vol 20 (16) ◽  
pp. 4356 ◽  
Author(s):  
Chi-Yi Tsai ◽  
Hao-Wei Chen

This paper presents an improved Convolutional Neural Network (CNN) architecture to recognize surface defects of the Calcium Silicate Board (CSB) using visual image information based on a deep learning approach. The proposed CNN architecture is inspired by the existing SurfNet architecture and is named SurfNetv2, which comprises a feature extraction module and a surface defect recognition module. The output of the system is the recognized defect category on the surface of the CSB. In the collection of the training dataset, we manually captured the defect images presented on the surface of the CSB samples. Then, we divided these defect images into four categories, which are crash, dirty, uneven, and normal. In the training stage, the proposed SurfNetv2 is trained through an end-to-end supervised learning method, so that the CNN model learns how to recognize surface defects of the CSB only through the RGB image information. Experimental results show that the proposed SurfNetv2 outperforms five state-of-the-art methods and achieves a high recognition accuracy of 99.90% and 99.75% in our private CSB dataset and the public Northeastern University (NEU) dataset, respectively. Moreover, the proposed SurfNetv2 model achieves a real-time computing speed of about 199.38 fps when processing images with a resolution of 128 × 128 pixels. Therefore, the proposed CNN model has great potential for real-time automatic surface defect recognition applications.


2018 ◽  
Vol 2018 ◽  
pp. 1-8
Author(s):  
Hou Jingzhong ◽  
Xia Kewen ◽  
Yang Fan ◽  
Zu Baokai

Strip steel surface defect recognition is a pattern recognition problem with wide applications. Previous works on strip surface defect recognition mainly focus on feature selection and dimension reduction. There are also approaches on real-time systems that mainly exploit the autocorrection within some given picture. However, the instances cannot be used in practical applications because of a bad recognition rate and low efficiency. In this paper, we study the intelligent algorithm of strip steel surface defect recognition, where the goal is to improve the accuracy and save running time. This problem is very important in various applications, especially the process testing of steel manufacturing. We propose an approach called the second-order cone programming (SOCP) optimized multiple kernel relevance vector machine (MKRVM), which can recognize strip surface defects much better than other methods. The method includes the model parameter estimation, training, and optimization of the model based on SOCP and the classification test. We compare our approach with existing methods on strip surface defect recognition. The results demonstrate that our proposed approach can improve the recognition accuracy and reduce the time costs of the strip surface defect.


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