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SEM review color imaging detection of gate to source/drain short in 14nm finFET device (Conference Presentation)
Metrology, Inspection, and Process Control for Microlithography XXXI
◽
10.1117/12.2253723
◽
2017
◽
Author(s):
Kwame Owusu-Boahen
◽
JaeHun Park
◽
HyeJung Lee
Keyword(s):
Color Imaging
◽
Imaging Detection
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Determining the optimal expression method for dual-color imaging
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High resolution image processing and CT perfusion imaging detection in patients with cerebral hemorrhage based on embedded system
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Electrically Switchable Color-Selective Organic Photodetectors for Full-Color Imaging
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