Feed-forward alignment correction for advanced overlay process control using a standalone alignment station "Litho Booster"

Author(s):  
Takehisa Yahiro ◽  
Junpei Sawamura ◽  
Tomonori Dosho ◽  
Yuji Shiba ◽  
Satoshi Ando ◽  
...  
2009 ◽  
Vol 2009 (13) ◽  
pp. 3722-3729 ◽  
Author(s):  
Thomas Walz ◽  
J.R. Coughenour ◽  
Kevin Williams ◽  
John Jacobs ◽  
Larry Shone ◽  
...  

2008 ◽  
Vol 1107 ◽  
Author(s):  
Carol M. Jantzen ◽  
James C. Marra

AbstractVitrification is currently the most widely used technology for the treatment of high level radioactive wastes (HLW) throughout the world. At the Savannah River Site (SRS) actual HLW tank waste has successfully been processed to stringent product and process constraints without any rework into a stable borosilicate glass waste since 1996. A unique “feed forward” statistical process control (SPC) has been used rather than statistical quality control (SQC). In SPC, the feed composition to the melter is controlled prior to vitrification. In SQC, the glass product is sampled after it is vitrified. Individual glass property models form the basis for the “feed forward” SPC. The property models transform constraints on the melt and glass properties into constraints on the feed composition. The property models are mechanistic and depend on glass bonding/structure, thermodynamics, quasicrystalline melt species, and/or electron transfers. The mechanistic models have been validated over composition regions well outside of the regions for which they were developed because they are mechanistic. Mechanistic models allow accurate extension to radioactive and hazardous waste melts well outside the composition boundaries for which they were developed.


2011 ◽  
Vol 2011 (6) ◽  
pp. 224-236
Author(s):  
Tilo Stahl ◽  
George Lee ◽  
Matthew Gray ◽  
Steven Kestel

1956 ◽  
Vol 48 (2) ◽  
pp. 81-84
Author(s):  
William Priestley ◽  
B. Dudenbostel, Jr.

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