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Study of high throughput EUV mask pattern inspection technologies using multi e-Beam optics
Mapping Intimacies
◽
10.1117/12.2598235
◽
2021
◽
Author(s):
Tadayuki Sugimori
◽
Riki Ogawa
◽
Hidekazu Takekoshi
◽
John G. Hartley
◽
David J. Pinckeny
◽
...
Keyword(s):
High Throughput
◽
Mask Pattern
◽
Beam Optics
Download Full-text
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Cited By
References
Study of high throughput EUV mask pattern inspection technologies using multi e-beam optics
10.1117/12.2600987
◽
2021
◽
Author(s):
Tadayuki Sugimori
◽
Riki Ogawa
◽
Hidekazu Takekoshi
◽
John G. Hartley
◽
David J. Pinckney
◽
...
Keyword(s):
High Throughput
◽
Mask Pattern
◽
Beam Optics
Download Full-text
Development of extreme ultraviolet mask pattern inspection technology using projection electron beam optics
Journal of Micro/Nanolithography MEMS and MOEMS
◽
10.1117/1.jmm.12.2.021003
◽
2013
◽
Vol 12
(2)
◽
pp. 021003
◽
Cited By ~ 21
Author(s):
Ryoichi Hirano
◽
Hidehiro Watanabe
◽
Susumu Iida
◽
Tsuyoshi Amano
◽
Tsuneo Terasawa
◽
...
Keyword(s):
Electron Beam
◽
Extreme Ultraviolet
◽
Mask Pattern
◽
Beam Optics
Download Full-text
Study of high throughput EUV mask pattern defect inspection technologies using multibeam electron optics
Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV
◽
10.1117/12.2583613
◽
2021
◽
Author(s):
Hidekazu Takekoshi
◽
Riki Ogawa
◽
John G. Hartley
◽
David J. Pinckeny
◽
Atsushi Ando
◽
...
Keyword(s):
High Throughput
◽
Electron Optics
◽
Mask Pattern
◽
Defect Inspection
Download Full-text
Simulation of electron and ion beam optics for high throughput lithography
Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.00EX387)
◽
10.1109/imnc.2000.872658
◽
2002
◽
Author(s):
X. Zhu
◽
H. Liu
◽
E. Munro
◽
J. Rouse
Keyword(s):
High Throughput
◽
Ion Beam
◽
Beam Optics
Download Full-text
Design of multi-beam optics for high throughput parallel processing
Journal of Laser Applications
◽
10.2351/1.5125778
◽
2020
◽
Vol 32
(1)
◽
pp. 012005
◽
Cited By ~ 3
Author(s):
Oskar Hofmann
◽
Jochen Stollenwerk
◽
Peter Loosen
Keyword(s):
Parallel Processing
◽
High Throughput
◽
Beam Optics
Download Full-text
High Throughput Screening Methods
10.1039/9781782626770
◽
2016
◽
Cited By ~ 4
Keyword(s):
High Throughput
◽
High Throughput Screening
◽
Screening Methods
Download Full-text
154: Integration of TPSA and High-Throughput Mass Spectrometry Data Improves Prostate Cancer Prediction
The Journal of Urology
◽
10.1016/s0022-5347(18)30419-1
◽
2007
◽
Vol 177
(4S)
◽
pp. 52-53
Author(s):
Stefano Ongarello
◽
Eberhard Steiner
◽
Regina Achleitner
◽
Isabel Feuerstein
◽
Birgit Stenzel
◽
...
Keyword(s):
Prostate Cancer
◽
Mass Spectrometry
◽
High Throughput
◽
Mass Spectrometry Data
◽
Cancer Prediction
Download Full-text
461: Increasing the Predictive Ability of Clinico-pathologic Markers for Prostate Cancer using Biomarkers Derived from High-Throughput Tissue Micorarray Studies in a Large Retrospective Cohort: A Stratification Strategy
The Journal of Urology
◽
10.1016/s0022-5347(18)34714-1
◽
2005
◽
Vol 173
(4S)
◽
pp. 126-126
Author(s):
Gustavo Ayala
◽
R. Li
◽
A. Frolov
◽
Michael Ittmann
◽
Hong Dai
◽
...
Keyword(s):
Prostate Cancer
◽
High Throughput
◽
Retrospective Cohort
◽
Predictive Ability
Download Full-text
Immunohistochemical features of early breast cancer in young women; a translational research project using high-throughput tissue microarray technology
European Journal of Cancer
◽
10.1016/s0959-8049(02)80347-1
◽
2002
◽
Vol 38
(11)
◽
pp. S108
Author(s):
J Van der Hage
Keyword(s):
Breast Cancer
◽
Translational Research
◽
Tissue Microarray
◽
Early Breast Cancer
◽
High Throughput
◽
Young Women
◽
Microarray Technology
◽
Research Project
Download Full-text
Automated High-Throughput Purification of PCR Products Using Wizard®MagneSil™ Paramagnetic Particles
JALA Journal of the Association for Laboratory Automation
◽
10.1016/s1535-5535(04)00232-1
◽
2002
◽
Vol 7
(6)
◽
pp. 120-124
Author(s):
P Otto
Keyword(s):
High Throughput
◽
Pcr Products
Download Full-text
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