Development of UV to IR band nanostructured antireflection coating technology for improved detector and sensor performance

Author(s):  
Ashok K. Sood
Author(s):  
Ashok K. Sood ◽  
John W. Zeller ◽  
Gopal G. Pethuraja ◽  
Adam W. Sood ◽  
Roger E. Welser ◽  
...  

2021 ◽  
Author(s):  
Ashok K. Sood ◽  
John W. Zeller ◽  
Adam W. Sood ◽  
Roger E. Welser ◽  
Parminder Ghuman ◽  
...  

2009 ◽  
Vol 63 (9) ◽  
pp. 1060-1063
Author(s):  
Kunio Osaki
Keyword(s):  

2007 ◽  
Vol 61 (2) ◽  
pp. 127-131
Author(s):  
Katsumi Ishizuka

Author(s):  
Brennan Davis ◽  
Wilson Chi

Abstract The use of an antireflection coating for backside semiconductor failure analysis is discussed. The process of selecting an appropriate coating is described. Several known coatings are also described in regards to imaging quality, material properties, and the benefits to device analysis applications.


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