Characterization of nanomechanical and piezoelectric properties of AlN thin film for thin film bulk acoustic wave resonators
2004 ◽
Vol 43
(8A)
◽
pp. 5510-5515
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Keyword(s):
2009 ◽
Vol 56
(8)
◽
pp. 1731-1744
◽
Keyword(s):
2010 ◽
Vol 157
(12)
◽
pp. J419
◽
Keyword(s):
Keyword(s):
Keyword(s):