Phase-shifting interferometry on structured light projection is widely used in 3-D surface measurement. An investigation shows that least-squares fitting can significantly decrease random error by incorporating data from the intermediate phase values, but it cannot completely eliminate nonlinear error. This paper proposes an error-reduction method based on double three-step phase-shifting algorithm and least-squares fitting, and applies it on the temporal phase unwrapping algorithm using three-frequency heterodyne principle. Theoretical analyses and experiment results show that this method can greatly save data acquisition time and improve the precision.
The measurement of plasma-facing materials’ topography variation by means of temporal phase-shifting speckle interferometry technique