An epitaxial BaTiO3 film with 290-nm thickness was prepared on a MgO(001) single-crystal substrate by radio-frequency magnetron sputter deposition. The structural characteristics of the film were studied as a function of temperature in in situ, real-time synchroton x-ray scattering experiments. We found that the as-grown film was strained at room temperature and tetragonally distorted with the c axis normal to the film surface. Interestingly, its lattice parameters were found to be expanded 1.28% and 0.64% in both the in-plane and the out-of-plane directions, respectively (i.e., biaxially), comparing to those of a bulk BaTiO3. More importantly, as it was heated to 600 °C, the tetragonal structure was kept up without the phase transition, which is usually observed in other epitaxial ferroelectric thin films.
Real-time out-of-plane artifact subtraction tomosynthesis imaging using prior CT for scanning beam digital x-ray system