Synchrotron Light for X-ray Lithography: Researchers in West Berlin are building a miniature electron storage ring to test this new microcircuit fabrication technology
Keyword(s):
X Ray
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1985 ◽
Vol 138
(3)
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pp. 279-284
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1992 ◽
Vol 63
(1)
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pp. 1539-1542
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2002 ◽
Vol 30
(9)
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pp. 531-537
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1971 ◽
Vol 18
(3)
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pp. 210-212
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1989 ◽
Vol 10
(1)
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pp. 41-47
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