Synchrotron Light for X-ray Lithography: Researchers in West Berlin are building a miniature electron storage ring to test this new microcircuit fabrication technology

Science ◽  
1985 ◽  
Vol 228 (4695) ◽  
pp. 39-40
Author(s):  
A. L. ROBINSON
Author(s):  
A. Zholents ◽  
J. Byrd ◽  
S. Chattopadhyay ◽  
H. Chong ◽  
T.E. Glover ◽  
...  
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1985 ◽  
Vol 138 (3) ◽  
pp. 279-284 ◽  
Author(s):  
G. Schmahl ◽  
B. Niemann ◽  
D. Rudolph ◽  
P. Guttmann ◽  
V. Sarafis

1981 ◽  
Vol 59 (11) ◽  
pp. 1811-1816
Author(s):  
J. B. A. Mitchell ◽  
J. Wm. McGowan ◽  
G. M. Bancroft

The 10 GeV CHEER electron storage ring will produce more than 1 MW of synchrotron radiation per turn with photon energies extending from the far infrared to the hard X-ray region. The critical energy of the synchrotron radiation spectrum will be 22 keV.Applications of hard X-rays to materials analysis are described and a discussion of some of the problems which will be encountered in implementing a synchrotron radiation facility at CHEER is presented.


2002 ◽  
Vol 30 (9) ◽  
pp. 531-537 ◽  
Author(s):  
Takahiro INOUE ◽  
Shuji MIYAMOTO ◽  
Sho AMANO ◽  
Takayasu MOCHIZUKI ◽  
Mitsuyasu YATSUZUKA

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