Structural-phase transformations in SiOx films in the course of vacuum heat treatment
2019 ◽
Vol 120
(4)
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pp. 366-370
1987 ◽
Vol 17
(12)
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pp. 1616-1620
1982 ◽
Vol 43
(C4)
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pp. C4-145-C4-150
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Keyword(s):
2019 ◽
Vol 34
(2)
◽
pp. 36-42
Keyword(s):
2005 ◽
Vol 5
(5)
◽
pp. 729-732
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2020 ◽
Vol 62
(1)
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pp. 200-205
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