Design of a soft X-ray and extreme UV reflectometer equipped with a high-resolution monochromator and high-brightness laser-plasma radiation source
2015 ◽
Vol 9
(4)
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pp. 726-734
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Keyword(s):
X Ray
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1993 ◽
Vol 23
(1)
◽
pp. 76-80
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Micromachining of organic polymers by X-ray photo-etching using a 10Hz laser-plasma radiation source
2005 ◽
Vol 78-79
◽
pp. 452-456
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1985 ◽
Vol 3
(1)
◽
pp. 258
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