Quantitative Interpretation of Electron Spectroscopy Signals. Extracting the Differential Inverse Inelastic Mean Free Path and Differential Surface Excitation Probability in Solids

2020 ◽  
Vol 14 (6) ◽  
pp. 1324-1341
Author(s):  
V. P. Afanas’ev ◽  
Yu. N. Bodisko ◽  
A. S. Gryazev ◽  
D. S. Efremenko ◽  
P. S. Kaplya
Keyword(s):  
Free Path ◽  
Electron Spectroscopy ◽  
Mean Free Path ◽  
Quantitative Interpretation ◽  
Surface Excitation ◽  
Inelastic Mean Free Path ◽  
Excitation Probability

Inelastic Mean Free Path Data for Si Corrected for Surface Excitation

2005 ◽  
Vol 11 (6) ◽  
pp. 581-585
Author(s):  
Gábor Tamás Orosz ◽  
György Gergely ◽  
Sándor Gurbán ◽  
Miklós Menyhard ◽  
Aleksander Jablonski
Keyword(s):  
Monte Carlo ◽  
Electron Transport ◽  
Free Path ◽  
Photoelectron Spectroscopy ◽  
Electron Spectroscopy ◽  
Mean Free Path ◽  
Thin Layers ◽  
Elastic Peak ◽  
Surface Excitation ◽  
Inelastic Mean Free Path

Surface-sensitive electron spectroscopies, like Auger electron spectroscopy, X-ray photoelectron spectroscopy and elastic peak electron spectroscopy (EPES) are suitable techniques to investigate surfaces and thin layers. A theoretical model for electron transport is needed to process the observed electron spectra. Electron transport descriptions are based on the differential elastic cross sections for the sample atoms and the inelastic mean free path (IMFP) of backscattered electrons. An electron impinging on the sample can lose energy either due to surface or volume excitations. In the present work a Monte Carlo (MC) simulation of the elastic peak of Si, Ag, Ni, Cu, and Au for surface analysis is presented. The IMFP of Si was determined applying the EPES method. The integrated elastic peak ratio of Si with the standard metal reference samples corrected for surface excitation provided IMFP values of Si in the energy range E = 0.2–2.0 keV. Experiments were made with the ESA 31 HSA (ATOMKI) and with the DESA-100 (Staib) spectrometers. Surface correction was based on the application of Chen's model and material parameters. The Monte Carlo simulations of elastically backscattered electron trajectories were made using new EPESWIN software of Jablonski. An improvement of IMFP experimental results was achieved applying the presented procedure.

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