Selective Epitaxial Growth on (100) Vicinal GaAs Surfaces by Atmospheric Pressure-Metalorganic Chemical Vapor Deposition Using Diethylgalliumchloride

1991 ◽  
Vol 30 (Part 2, No. 2B) ◽  
pp. L231-L234 ◽  
Author(s):  
Ko-ichi Yamaguchi ◽  
Kotaro Okamoto
Keyword(s):  
Chemical Vapor Deposition ◽  
Epitaxial Growth ◽  
Vapor Deposition ◽  
Atmospheric Pressure ◽  
Metalorganic Chemical Vapor Deposition ◽  
Chemical Vapor ◽  
Selective Epitaxial Growth ◽  
Metalorganic Chemical

A novel method of selective epitaxial growth of InP by metalorganic chemical vapor deposition

1987 ◽  
Vol 62 (4) ◽  
pp. 1284-1286 ◽  
Author(s):  
Akihiro Wakahara ◽  
Kangsa Pak ◽  
Hiroyuki Yamada ◽  
Akira Yoshida ◽  
Testuro Nakamura
Keyword(s):  
Chemical Vapor Deposition ◽  
Epitaxial Growth ◽  
Vapor Deposition ◽  
Metalorganic Chemical Vapor Deposition ◽  
Chemical Vapor ◽  
Selective Epitaxial Growth ◽  
Novel Method ◽  
Metalorganic Chemical

Hetero-Epitaxial Growth of ZnO Film by Temperature-Modulated Metalorganic Chemical Vapor Deposition

2009 ◽  
Vol 2 ◽  
pp. 045502 ◽  
Author(s):  
Eiji Fujimoto ◽  
Masatomo Sumiya ◽  
Tsuyoshi Ohnishi ◽  
Kenji Watanabe ◽  
Mikk Lippmaa ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Epitaxial Growth ◽  
Vapor Deposition ◽  
Metalorganic Chemical Vapor Deposition ◽  
Chemical Vapor ◽  
Zno Film ◽  
Metalorganic Chemical
Sign in / Sign up

Export Citation Format

Share Document