Effect of driving frequency on the electron energy distribution function and electron-sheath interaction in a low pressure capacitively coupled plasma

2016 ◽  
Vol 23 (11) ◽  
pp. 110701 ◽  
Author(s):  
S. Sharma ◽  
N. Sirse ◽  
P. K. Kaw ◽  
M. M. Turner ◽  
A. R. Ellingboe
Keyword(s):  
Distribution Function ◽  
Energy Distribution ◽  
Electron Energy ◽  
Electron Energy Distribution Function ◽  
Low Pressure ◽  
Energy Distribution Function ◽  
Driving Frequency ◽  
Electron Energy Distribution ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma
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