High-Power Microwave Window for Reactive Plasma Production
1993 ◽
Vol 32
(Part 1, No. 9A)
◽
pp. 3985-3986
◽
Keyword(s):
2019 ◽
Vol 139
(10)
◽
pp. 421-427
Keyword(s):
Keyword(s):
Keyword(s):