Auger Electron Spectroscopy Study on the Stability and the Interfacial Reaction of Ta, Ta-N and TaN Films as a Diffusion Barrier between Cu9Al4Film and Si

Interfacial Reaction ◽

Diffusion Barrier ◽

Electron Spectroscopy ◽

Auger Electron ◽

Spectroscopy Study ◽

The Stability

Auger Electron Spectroscopy Study on the Stability of the Interface between Deposited Cu9Al4Intermetallic Compound Film and Si

Japanese Journal of Applied Physics ◽

10.1143/jjap.30.l632 ◽

1991 ◽

Vol 30 (Part 2, No. 4A) ◽

pp. L632-L635 ◽

Cited By ~ 2

Author(s):

Atsushi Noya ◽

Katsutaka Sasaki ◽

Shirou Ohtaka ◽

Nobuyuki Sasao

Keyword(s):

Electron Spectroscopy ◽

Auger Electron ◽

Spectroscopy Study ◽

The Stability

Auger Electron Spectroscopy Study on the Stability of the Interface between Deposited Cu9Al4Intermetallic Compound Film and Si [Vol. 30 (1991) No. 4A]

Japanese Journal of Applied Physics ◽

10.1143/jjap.30.l1148 ◽

1991 ◽

Vol 30 (Part 2, No. 6B) ◽

pp. L1148-L1148

Author(s):

Atsushi Noya ◽

Katsutaka Sasaki ◽

Shirou Ohtaka ◽

Nobuyuki Sasao

Keyword(s):

Electron Spectroscopy ◽

Auger Electron ◽

Spectroscopy Study ◽

The Stability

Auger electron spectroscopy study of Ni3Si

Scripta Metallurgica ◽

10.1016/0036-9748(89)90492-4 ◽

1989 ◽

Vol 23 (11) ◽

pp. 1969-1973 ◽

Cited By ~ 16

Author(s):

I. Baker ◽

R.A. Padgett ◽

E.M. Schulson

Keyword(s):

Electron Spectroscopy ◽

Auger Electron ◽

Auger Electron Spectroscopy Study of GaAs Substrate Cleaning Procedures

Journal of The Electrochemical Society ◽

10.1149/1.2123868 ◽

1982 ◽

Vol 129 (2) ◽

pp. 406-408 ◽

Cited By ~ 14

Author(s):

J. L. Zilko ◽

R. S. Williams

Keyword(s):

Electron Spectroscopy ◽

Gaas Substrate ◽

Auger Electron ◽

Spectroscopy Study ◽

Cleaning Procedures ◽

Substrate Cleaning

Scanning Auger Electron Spectroscopy Study of Junctions between Solid Electrolytes

Surface and Interface Analysis ◽

10.1002/(sici)1096-9918(199705)25:5<352::aid-sia243>3.0.co;2-a ◽

1997 ◽

Vol 25 (5) ◽

pp. 352-355

Author(s):

A. Dubbe ◽

Y. Sadaoka

Keyword(s):

Electron Spectroscopy ◽

Solid Electrolytes ◽

Auger Electron ◽

Auger electron spectroscopy study of reactive ion etched silicon carbide

Microelectronic Engineering ◽

10.1016/j.mee.2005.10.014 ◽

2006 ◽

Vol 83 (1) ◽

pp. 12-16 ◽

Cited By ~ 1

Author(s):

J.H. Xia ◽

Rusli ◽

S.F. Choy ◽

R. Gopalakrishan ◽

C.C. Tin ◽

...

Keyword(s):

Silicon Carbide ◽

Electron Spectroscopy ◽

Auger Electron ◽

Spectroscopy Study ◽

Etched Silicon

An Auger Electron Spectroscopy Study of Bronze Route Niobium-Tin Diffusion Layers

Filamentary A15 Superconductors ◽

10.1007/978-1-4684-3887-1_11 ◽

1980 ◽

pp. 143-154 ◽

Cited By ~ 14

Author(s):

D. B. Smathers ◽

D. C. Larbalestier

Keyword(s):

Electron Spectroscopy ◽

Auger Electron ◽

Spectroscopy Study ◽

Diffusion Layers

Catalyst Deactivation 2001, Proceedings of the 9th International Symposium - Studies in Surface Science and Catalysis ◽

An Auger Electron Spectroscopy Study of SO2 Adsorption on Cerium-Zirconium Mixed Metal Oxides

10.1016/s0167-2991(01)80204-4 ◽

2001 ◽

pp. 247-253 ◽

Cited By ~ 1

Author(s):

Alan E. Nelson ◽

Kirk H. Schulz

Keyword(s):

Metal Oxides ◽

Electron Spectroscopy ◽

Auger Electron ◽

Mixed Metal Oxides ◽

Spectroscopy Study ◽

Mixed Metal ◽

So2 Adsorption

The Growth of Cobalt on Cu(100): An Angle Resolved Auger Electron Spectroscopy Study

Springer Proceedings in Physics - Surface Science ◽

10.1007/978-3-642-76376-2_28 ◽

1992 ◽

pp. 207-210

Author(s):

J. M. Heras ◽

M. C. Asensio ◽

G. Andreasen ◽

L. Viscido

Keyword(s):

Electron Spectroscopy ◽

Auger Electron ◽

Auger electron spectroscopy study of the epitaxial growth mode of (Ca, Sr)F2 on GaAs(100)

Surface Science ◽

10.1016/0039-6028(86)90900-3 ◽

1986 ◽

Vol 168 (1-3) ◽

pp. 681-687 ◽

Cited By ~ 8

Author(s):

C. Fontaine ◽

J.L. Castano ◽

J. Castagné ◽

A. Munoz-Yague

Keyword(s):

Epitaxial Growth ◽

Electron Spectroscopy ◽

Auger Electron ◽

Growth Mode ◽