Proximity effect correction for nanolithography
1996 ◽
Vol 14
(4)
◽
pp. 2445
◽
1999 ◽
Vol 17
(6)
◽
pp. 2860
◽
1997 ◽
Vol 15
(6)
◽
pp. 2309
◽
Keyword(s):
2017 ◽
Vol 35
(5)
◽
pp. 051603
◽
2020 ◽
Vol 38
(6)
◽
pp. 062603
Keyword(s):
2010 ◽
Vol 31
(8)
◽
pp. 086001
◽