In Situ Transmission Electron Microscopy Observation of Single Crystallization of Filled Aluminum Interconnection

1995 ◽  
Vol 34 (Part 2, No. 10A) ◽  
pp. L1260-L1262 ◽  
Author(s):  
Jun-ichi Wada ◽  
Hiroshi Toyoda ◽  
Hisashi Kaneko ◽  
Nobuo Hayasaka ◽  
Hidehiro Yasuda ◽  
...  
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