It has been studied that the dependence of tunneling coefficient T on the ratio x of Ge, on
the barrier width B L , on the well width W L and on the periodicity N in periodic superlattices
Si1-xGex/Si by the method of transfer matrix, and shown in figures. The dependence of peak region
width W on the above parameters are discussed in detail, and plotted, those are fitted in functions.
These results may be useful to convert a weak mechanical signal into a strong tunneling current
signal and to design electron devices based on meso- piezoresistive effect in the superlattices
Si1-xGex/Si.