Characteristics of Very High-Aspect-Ratio Contact Hole Etching
1997 ◽
Vol 36
(Part 1, No. 4B)
◽
pp. 2470-2476
◽
2019 ◽
Vol 112
◽
pp. 704-713
◽
2018 ◽
Vol 86
◽
pp. 1-39
◽
2014 ◽
Vol 24
(12)
◽
pp. 125026
◽
Keyword(s):
Keyword(s):
1999 ◽
Vol 17
(3)
◽
pp. 1094
◽
2000 ◽
Vol 53
(1-4)
◽
pp. 493-496
◽
2007 ◽
Vol 111
(1)
◽
pp. 21-26
◽
Keyword(s):