100-nm-Scale Alignment using Laser Beam Diffraction Pattern Observation Techniques and Wafer Fusion for Realizing Three-Dimensional Photonic Crystal Structure

1998 ◽  
Vol 37 (Part 1, No. 6A) ◽  
pp. 3334-3338 ◽  
Author(s):  
Noritsugu Yamamoto ◽  
Susumu Noda
Keyword(s):  
Crystal Structure ◽  
Photonic Crystal ◽  
Laser Beam ◽  
Diffraction Pattern ◽  
Three Dimensional ◽  
Photonic Crystal Structure ◽  
Wafer Fusion ◽  
Dimensional Photonic Crystal ◽  
Beam Diffraction

Fabrication of Three-Dimensional Photonic Crystal by Wafer Fusion Approach

2001 ◽  
Vol 681 ◽  
Author(s):  
Noritsugu Yamamoto ◽  
Katsuhiro Tomoda ◽  
Susumu Noda
Keyword(s):  
Photonic Crystal ◽  
Photonic Crystals ◽  
Optical Communication ◽  
Three Dimensional ◽  
Optoelectronic Devices ◽  
Photonic Crystal Waveguide ◽  
Wafer Fusion ◽  
Dimensional Photonic Crystal ◽  
Alignment System ◽  
Fusion Approach

ABSTRACTBased on a set of requirements identified for photonic crystals intended for use in optoelectronic devices, we have developed a method of fabricating three-dimensional photonic crystals that involves stacking air/semiconductor gratings by wafer fusion approach. Precise alignment of the stacked layers is achieved through the use of a laser beam assisted very precise alignment system, and three-dimensional photonic crystal has been successfully fabricated for the infrared and optical communication wavelength regions. We have also developed a photonic crystal waveguide providing sharp 90° bend.

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