Fabrication of Three-Dimensional Photonic Crystal by Wafer Fusion Approach

ABSTRACTBased on a set of requirements identified for photonic crystals intended for use in optoelectronic devices, we have developed a method of fabricating three-dimensional photonic crystals that involves stacking air/semiconductor gratings by wafer fusion approach. Precise alignment of the stacked layers is achieved through the use of a laser beam assisted very precise alignment system, and three-dimensional photonic crystal has been successfully fabricated for the infrared and optical communication wavelength regions. We have also developed a photonic crystal waveguide providing sharp 90° bend.