Thick-Dielectric Formation and MOSFET Reliability with Spin-Coating Film Transfer and Hot-Pressing Technique for Seamless Integration Technology

2004 ◽  
Vol 43 (4B) ◽  
pp. 2271-2276 ◽  
Author(s):  
Norio Sato ◽  
Nobuhiro Shimoyama ◽  
Toshikazu Kamei ◽  
Kazuhisa Kudou ◽  
Masaki Yano ◽  
...  
Keyword(s):  
Spin Coating ◽  
Hot Pressing ◽  
Coating Film ◽  
Seamless Integration ◽  
Integration Technology ◽  
Film Transfer

Characterization of Air-Gap Sealing with Organic Dielectric Using Spin-Coating Film Transfer and Hot-Pressing Technology

2007 ◽  
Vol 46 (12) ◽  
pp. 7678-7683
Author(s):  
Norio Sato ◽  
Katsuyuki Machida ◽  
Hiromu Ishii ◽  
Yoji Ishimura ◽  
Hidenori Saito ◽  
...  
Keyword(s):  
Spin Coating ◽  
Hot Pressing ◽  
Air Gap ◽  
Coating Film ◽  
Film Transfer ◽  
Organic Dielectric ◽  
Pressing Technology

Advanced Spin Coating Film Transfer and Hot-Pressing Process for Global Planarization with Dielectric-Material-Viscosity Control

2002 ◽  
Vol 41 (Part 1, No. 4B) ◽  
pp. 2367-2373 ◽  
Author(s):  
Norio Sato ◽  
Katsuyuki Machida ◽  
Masaki Yano ◽  
Kazuhisa Kudou ◽  
Hakaru Kyuragi
Keyword(s):  
Spin Coating ◽  
Hot Pressing ◽  
Dielectric Material ◽  
Coating Film ◽  
Pressing Process ◽  
Film Transfer

A Sealing Technique for Stacking MEMS on LSI Using Spin-Coating Film Transfer and Hot Pressing

2003 ◽  
Vol 42 (Part 1, No. 4B) ◽  
pp. 2462-2467 ◽  
Author(s):  
Norio Sato ◽  
Hiromu Ishii ◽  
Satoshi Shigematsu ◽  
Hiroki Morimura ◽  
Toshikazu Kamei ◽  
...  
Keyword(s):  
Spin Coating ◽  
Hot Pressing ◽  
Coating Film ◽  
Film Transfer

Peel-Off Characteristics at Interface between Base Film and Dielectrics with Spin-Coating Film Transfer and Hot-Pressing Technology

2007 ◽  
Vol 46 (10A) ◽  
pp. 6564-6567
Author(s):  
Toshikazu Kamei ◽  
Norio Sato ◽  
Kazuhisa Kudou ◽  
Masafumi Kawagoe ◽  
Hideki Adachi ◽  
...  
Keyword(s):  
Spin Coating ◽  
Hot Pressing ◽  
Coating Film ◽  
Film Transfer ◽  
Pressing Technology

Advanced transfer system for spin coating film transfer and hot-pressing in planarization technology

2002 ◽  
Vol 20 (3) ◽  
pp. 797 ◽  
Author(s):  
Norio Sato ◽  
Katsuyuki Machida ◽  
Kazuhisa Kudou ◽  
Masaki Yano ◽  
Hakaru Kyuragi
Keyword(s):  
Spin Coating ◽  
Hot Pressing ◽  
Coating Film ◽  
Transfer System ◽  
Film Transfer

Spin Coating Film Transfer and Hot-Pressing System for Uniform Dielectric Formation and Its Application to Porous Low-kFilm Formation

2008 ◽  
Vol 47 (1) ◽  
pp. 113-118 ◽  
Author(s):  
Masafumi Kawagoe ◽  
Hideki Adachi ◽  
Takaaki Yanagida ◽  
Tomoyuki Komura ◽  
Hidenori Saito ◽  
...  
Keyword(s):  
Spin Coating ◽  
Hot Pressing ◽  
Coating Film ◽  
Film Transfer

Preparation and Gas-Sensing Property of Coppertetra-Iso-Propoxyphthalocyanine Spin-Coating Film

2011 ◽  
Vol 197-198 ◽  
pp. 1735-1738
Author(s):  
Qiang Li ◽  
Li Hua Huo ◽  
Shan Gao ◽  
Xiao Juan Qi ◽  
Hui Zhao
Keyword(s):  
Thin Films ◽  
Spin Coating ◽  
Gas Sensing ◽  
High Sensitivity ◽  
Coating Film ◽  
Gas Sensing Properties ◽  
Response And Recovery ◽  
Ft Ir ◽  
Spinning Speed ◽  
Spectroscopy Property

The thin films of copper 2, 9, 16, 23-tetra-iso-propoxy phthalocyanine (i-pro-CuPc) were prepared by spin-coating technique. The surface morphology and spectroscopy property of the thin films were characterized by AFM, UV-Vis and FT-IR spectra. The results show that good films can be obtained under certain spinning speed. The gas-sensing properties of the multilayers to three alcohols gas were measured at room temperature. The spin-coating thin films exhibited high sensitivity and rapid response- recovery characteristics to these gases. The response and recovery time of the thin films to 30*10-6 v/v of C2H5OH vapor is only 28 s and 55 s, respectively.

Characterization of a novel super-hydrophilic coating film as a function of different spin coating speeds

2013 ◽  
Vol 63 (2) ◽  
pp. 246-250 ◽  
Author(s):  
Yeun-Ho Joung ◽  
Won Seok Choi ◽  
Yongtak Shin ◽  
Minji Lee ◽  
Heekon Kim ◽  
...  
Keyword(s):  
Spin Coating ◽  
Coating Film ◽  
Hydrophilic Coating
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