Optoelectronic and Structural Properties of Undoped Microcrystalline Silicon Thin Films: Dependence on Substrate Temperature in Very High Frequency Plasma Enhanced Chemical Vapor Deposition Technique
2004 ◽
Vol 43
(6A)
◽
pp. 3269-3274
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2005 ◽
Vol 19
(21)
◽
pp. 3413-3413
2003 ◽
2006 ◽
Vol 45
(5A)
◽
pp. 4003-4005
◽
2005 ◽
Vol 19
(18)
◽
pp. 3013-3020
2011 ◽
Vol 46
(15)
◽
pp. 5085-5089
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