Growth and characterization of microcrystalline silicon films and devices using very high frequency plasma enhanced chemical vapor deposition
2005 ◽
Vol 19
(21)
◽
pp. 3413-3413
2011 ◽
Vol 46
(15)
◽
pp. 5085-5089
◽
1999 ◽
Vol 38
(Part 1, No. 10)
◽
pp. 5750-5756
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2004 ◽
Vol 43
(6A)
◽
pp. 3269-3274
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2006 ◽
Vol 45
(5A)
◽
pp. 4003-4005
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