Optimum Light Intensity Distribution for Growing Large Si Grains by Phase-Modulated Excimer-Laser Annealing
2004 ◽
Vol 43
(2)
◽
pp. 739-744
◽
Keyword(s):
Keyword(s):
Grain Enlargement of Polycrystalline Silicon by Multipulse Excimer Laser Annealing: Role of Hydrogen
2006 ◽
Vol 45
(4A)
◽
pp. 2726-2730
◽
1998 ◽
Vol 136
(4)
◽
pp. 298-305
◽
Keyword(s):
1994 ◽
Vol 48
(3)
◽
pp. 321-336
◽
Keyword(s):