Determination of Band Alignment of Hafnium Silicon Oxynitride/Silicon (HfSiON/Si) Structures using Electron Spectroscopy

2005 ◽  
Vol 44 (3) ◽  
pp. 1301-1305 ◽  
Author(s):  
Yuuichi Kamimuta ◽  
Masahiro Koike ◽  
Tsunehiro Ino ◽  
Masamichi Suzuki ◽  
Masato Koyama ◽  
...  
Author(s):  
Yuta Osawa ◽  
Kenichiro Iwasaki ◽  
Takayuki Nakanishi ◽  
Atsuo Yasumori ◽  
Yoshio Matsui ◽  
...  

2002 ◽  
Vol 507-510 ◽  
pp. 900-905 ◽  
Author(s):  
B. Lesiak ◽  
A. Jablonski ◽  
A. Kosinski ◽  
L. Kövér ◽  
J. Tóth ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document