Effects of Low Temperature Electronic Cyclotron Resonance Hydrogen Plasma Treatment and Annealing on the Electrical Properties of Ti and Ni Contacts to 4H-SiC
2012 ◽
Vol 51
◽
pp. 081302
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Keyword(s):
2012 ◽
Vol 51
(8R)
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pp. 081302
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Keyword(s):
2019 ◽
Vol 8
(11)
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pp. P661-P666
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2019 ◽
Vol 8
(2)
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pp. Q24-Q31
2012 ◽
Vol 51
(10S)
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pp. 10NA13
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1996 ◽
Vol 35
(Part 2, No. 11B)
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pp. L1494-L1497
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2005 ◽
Vol 118
(1-3)
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pp. 179-182
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Keyword(s):
2003 ◽
Vol 43
(5)
◽
pp. 914-917
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1993 ◽
Vol 127
(1-4)
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pp. 728-731
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