Effects of Low Temperature Electronic Cyclotron Resonance Hydrogen Plasma Treatment and Annealing on the Electrical Properties of Ti and Ni Contacts to 4H-SiC

2012 ◽  
Vol 51 (8R) ◽  
pp. 081302 ◽  
Author(s):  
Lingqin Huang ◽  
Qiaozhi Zhu ◽  
Mingchao Gao ◽  
Fuwen Qin ◽  
Dejun Wang
Keyword(s):  
Electrical Properties ◽  
Low Temperature ◽  
Plasma Treatment ◽  
Cyclotron Resonance ◽  
Hydrogen Plasma

Effects of Hydrogen Plasma Treatment Condition on Electrical Properties of β-Ga2O3

2019 ◽  
Vol 8 (11) ◽  
pp. P661-P666 ◽  
Author(s):  
A. Y. Polyakov ◽  
In-Hwan Lee ◽  
N. B. Smirnov ◽  
E. B. Yakimov ◽  
I. V. Shchemerov ◽  
...  
Keyword(s):  
Electrical Properties ◽  
Plasma Treatment ◽  
Treatment Condition ◽  
Hydrogen Plasma

Effect of Low Temperature RF Plasma Treatment on Electrical Properties of Junctionless InGaAs MOSFETs

2019 ◽  
Vol 8 (2) ◽  
pp. Q24-Q31
Author(s):  
Y. V. Gomeniuk ◽  
Y. Y. Gomeniuk ◽  
T. E. Rudenko ◽  
P. N. Okholin ◽  
V. I. Glotov ◽  
...  
Keyword(s):  
Electrical Properties ◽  
Low Temperature ◽  
Plasma Treatment ◽  
Rf Plasma

Hydrogen plasma treatment of β-Ga2O3: Changes in electrical properties and deep trap spectra

2019 ◽  
Vol 115 (3) ◽  
pp. 032101 ◽  
Author(s):  
A. Y. Polyakov ◽  
In-Hwan Lee ◽  
N. B. Smirnov ◽  
E. B. Yakimov ◽  
I. V. Shchemerov ◽  
...  
Keyword(s):  
Electrical Properties ◽  
Plasma Treatment ◽  
Hydrogen Plasma ◽  
Deep Trap

Low-Temperature Hydrogen-Plasma Treatment for Defect passivation in 4H-SiC

2003 ◽  
Vol 43 (5) ◽  
pp. 914-917 ◽  
Author(s):  
Myung Yoon Um ◽  
In Sang Jeon ◽  
Da Il Eom ◽  
Ho Keun Song ◽  
Hoon Joo Na ◽  
...  
Keyword(s):  
Low Temperature ◽  
Plasma Treatment ◽  
Hydrogen Plasma ◽  
Defect Passivation

Electrical properties of MBE grown layers of AlGaAsSb and the effects of proton implantation and hydrogen plasma treatment

1993 ◽  
Vol 127 (1-4) ◽  
pp. 728-731 ◽  
Author(s):  
A.Y. Polyakov ◽  
S.J. Eglash ◽  
A.G. Milnes ◽  
M. Ye ◽  
S.J. Pearton ◽  
...  
Keyword(s):  
Electrical Properties ◽  
Plasma Treatment ◽  
Hydrogen Plasma ◽  
Proton Implantation
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