Characteristics of Silicon Silicon-Dioxide Structures Formed by DC Reactive Sputtering
1968 ◽
Vol 7
(10)
◽
pp. 1193-1201
◽
Keyword(s):
2001 ◽
Vol 47
(5)
◽
pp. 791-798
◽
Keyword(s):
1987 ◽
Vol 34
(6)
◽
pp. 1557-1563
◽
Keyword(s):