MATERIALS CHARACTERIZATION IN THE ABERRATION-CORRECTED SCANNING TRANSMISSION ELECTRON MICROSCOPE

2005 ◽  
Vol 35 (1) ◽  
pp. 539-569 ◽  
Author(s):  
M. Varela ◽  
A.R. Lupini ◽  
K. van Benthem ◽  
A.Y. Borisevich ◽  
M.F. Chisholm ◽  
...  
Keyword(s):  
Electron Microscope ◽  
Transmission Electron Microscope ◽  
Scanning Transmission Electron Microscope ◽  
Materials Characterization ◽  
Scanning Transmission Electron ◽  
Transmission Electron ◽  
Scanning Transmission ◽  
Aberration Corrected

scholarly journals Detection of Arsenic Dopant Atoms in Silicon Crystal by Aberration Corrected Scanning Transmission Electron Microscope

2009 ◽  
Vol 15 (S2) ◽  
pp. 1488-1489
Author(s):  
Y Oshima ◽  
Y Hashimoto ◽  
H Sawada ◽  
N Hashikawa ◽  
K Asayama ◽  
...  
Keyword(s):  
Electron Microscope ◽  
Transmission Electron Microscope ◽  
Silicon Crystal ◽  
Scanning Transmission Electron Microscope ◽  
Scanning Transmission Electron ◽  
Transmission Electron ◽  
Scanning Transmission ◽  
Dopant Atoms ◽  
Aberration Corrected

Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

Sign in / Sign up

Export Citation Format

Share Document