Growth Rate and Temperature Dependence of Oxygen Incorporation in Si1-XGex Thin Films

2016 ◽  
Vol 75 (8) ◽  
pp. 551-560
Author(s):  
C. A. Jackson ◽  
A. J. Williams ◽  
P. W. Deelman
1987 ◽  
Vol 48 (C1) ◽  
pp. C1-661-C1-662 ◽  
Author(s):  
J. R. PETIT ◽  
P. DUVAL ◽  
C. LORIUS

2007 ◽  
Vol 19 (8-9) ◽  
pp. 749-754 ◽  
Author(s):  
Y. Y. Kim ◽  
C. H. Ahn ◽  
S. W. Kang ◽  
B. H. Kong ◽  
S. K. Mohanta ◽  
...  

AIP Advances ◽  
2018 ◽  
Vol 8 (5) ◽  
pp. 056213 ◽  
Author(s):  
Takuya Sato ◽  
Ryuji Hashimoto ◽  
Yoshitomo Tanaka ◽  
Kenichi Suzuki ◽  
Yasushi Enokido ◽  
...  

1999 ◽  
Vol 12 (5-8) ◽  
pp. 1097-1102 ◽  
Author(s):  
K.S. Kirn ◽  
Y.H. Seong ◽  
S.C. Yu ◽  
S.H. Han ◽  
H.J. Kim

2005 ◽  
Vol 87 (16) ◽  
pp. 161915 ◽  
Author(s):  
David A. Czaplewski ◽  
J. P. Sullivan ◽  
T. A. Friedmann ◽  
J. R. Wendt

2007 ◽  
Vol 992 ◽  
Author(s):  
Christos F. Karanikas ◽  
James J. Watkins

AbstractThe kinetics of the deposition of ruthenium thin films from the hydrogen assisted reduction of bis(2,2,6,6-tetramethyl-3,5-heptanedionato)(1,5-cyclooctadiene)ruthenium(II), [Ru(tmhd)2cod], in supercritical carbon dioxide was studied in order to develop a rate expression for the growth rate as well as to determine a mechanism for the process. The deposition temperature was varied from 240°C to 280°C and the apparent activation energy was 45.3 kJ/mol. Deposition rates up to 30 nm/min were attained. The deposition rate dependence on precursor concentrations between 0 and 0.2 wt. % was studied at 260°C with excess hydrogen and revealed first order deposition kinetics with respect to precursor at concentrations lower then 0.06 wt. % and zero order dependence at concentrations above 0.06 wt. %. The effect of reaction pressure on the growth rate was studied at a constant reaction temperature of 260°C and pressures between 159 bar to 200 bar and found to have no measurable effect on the growth rate.


2006 ◽  
Vol 16 (18) ◽  
pp. 1734-1740 ◽  
Author(s):  
Rosario Pardo ◽  
Marcos Zayat ◽  
David Levy

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