Relationship Between Structural and Optical Properties in Polycrystalline Silicon Films Prepared at Low Temperature by Plasma‐Enhanced Chemical Vapor Deposition
1998 ◽
Vol 145
(10)
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pp. 3615-3620
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2001 ◽
Vol 40
(Part 2, No. 11B)
◽
pp. L1207-L1210
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1995 ◽
Vol 86
(1-4)
◽
pp. 600-603
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1982 ◽
Vol 56
(2)
◽
pp. 313-323
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1999 ◽
Vol 337
(1-2)
◽
pp. 248-252
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1993 ◽
pp. 554-565
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1990 ◽
Vol 137
(11)
◽
pp. 3666-3674
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