A Monte Carlo Simulation Study of Radiation Heat Transfer in the Multiwafer LPCVD Reactor
1994 ◽
Vol 141
(2)
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pp. 496-501
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2006 ◽
Vol 29
(4)
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pp. 349-361
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1997 ◽
Vol 31
(2)
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pp. 131-142
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Keyword(s):
1999 ◽
Vol 36
(4)
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pp. 395-409
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Keyword(s):
Keyword(s):
2008 ◽
Vol 32
(2)
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pp. 63-68