X‐Ray Reflectivity Measurement of an Interface Layer Between a Low Temperature Silicon Epitaxial Layer and  HF  ‐ Treated Silicon Substrate

AbstractWe present an x-ray diffraction study of the variation of the tilt angle between a relaxed Si1−xGex epitaxial layer and the Si (001) substrate. Such measurements provide the basis for a new method to determine the nucleation activation energy of misfit dislocations. We show that the nucleation activation energy for 60° dislocations in the case of the multiplication mechanism observed in graded SiGe layers grown by UHV-CVD at low temperature is 4 eV.

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Study of X-Ray Reflectivity from Si Film/Interface Layer/Si Substrate and Application to Low-Temperature Epitaxially Grown Si/Si Substrate

Japanese Journal of Applied Physics ◽

10.1143/jjap.32.3312 ◽

1993 ◽

Vol 32 (Part 1, No. 7) ◽

pp. 3312-3316 ◽

Cited By ~ 4

Author(s):

Katsuhisa Usami ◽

Norio Kobayashi ◽

Akihiro Miyauchi

Keyword(s):

Low Temperature ◽

Interface Layer ◽

Si Substrate ◽

X Ray ◽

Film Interface

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Low-temperature activation of boron ion in silicon substrate using B10H14 + cluster and by soft X-ray irradiation

Japanese Journal of Applied Physics ◽

10.7567/jjap.57.116502 ◽

2018 ◽

Vol 57 (11) ◽

pp. 116502 ◽

Cited By ~ 1

Author(s):

Akira Heya ◽

Naoto Matsuo ◽

Kazuhiro Kanda

Keyword(s):

Low Temperature ◽

Silicon Substrate ◽

X Ray ◽

Temperature Activation

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Metal / Silicon Multilayers Produced by Low-Temperature MOCVD

MRS Proceedings ◽

10.1557/proc-555-19 ◽

1998 ◽

Vol 555 ◽

Cited By ~ 1

Author(s):

F. Hamelmann ◽

G. Haindl ◽

A. Klipp ◽

E. Majkova ◽

U. Kleineberg ◽

...

Keyword(s):

Low Temperature ◽

Substrate Temperature ◽

Layer Thickness ◽

Silicon Substrates ◽

Remote Plasma ◽

Reflectivity Measurement ◽

X Ray ◽

Excellent Growth ◽

Metal Layers

AbstractW/Si and Mo/Si multilayers with 20 periods (doublelayer spacing d = 24nm) were deposited on silicon substrates using (remote-) plasma-enhanced MOCVD. The substrate temperature was below 200°C, which is necessary to avoid interdiffusion of the layers. The layer thickness and growth was controlled by an in situ soft x-ray reflectivity measurement. The characterisation of the multilayers showed an excellent growth of the silicon layers, while the metal layers are rough with embedded crystallites.

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Low temperature x-ray microanalysis of frozen-hydrated tobacco leaves

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100111537 ◽

1984 ◽

Vol 42 ◽

pp. 284-285

Author(s):

S. Edith Taylor ◽

Patrick Echlin ◽

May McKoon ◽

Thomas L. Hayes

Keyword(s):

Low Temperature ◽

Lemna Minor ◽

Root Tips ◽

Tobacco Leaves ◽

X Ray ◽

Whole Cells ◽

Carbon Coated ◽

The Right ◽

Beam Currents ◽

The University

Low temperature x-ray microanalysis (LTXM) of solid biological materials has been documented for Lemna minor L. root tips. This discussion will be limited to a demonstration of LTXM for measuring relative elemental distributions of P,S,Cl and K species within whole cells of tobacco leaves.Mature Wisconsin-38 tobacco was grown in the greenhouse at the University of California, Berkeley and picked daily from the mid-stalk position (leaf #9). The tissue was excised from the right of the mid rib and rapidly frozen in liquid nitrogen slush. It was then placed into an Amray biochamber and maintained at 103K. Fracture faces of the tissue were prepared and carbon-coated in the biochamber. The prepared sample was transferred from the biochamber to the Amray 1000A SEM equipped with a cold stage to maintain low temperatures at 103K. Analyses were performed using a tungsten source with accelerating voltages of 17.5 to 20 KV and beam currents from 1-2nA.

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Bulk standards for low-temperature biological x-ray microanalysis

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100111525 ◽

1984 ◽

Vol 42 ◽

pp. 282-283

Author(s):

P. Echlin ◽

M. McKoon ◽

E.S. Taylor ◽

C.E. Thomas ◽

K.L. Maloney ◽

...

Keyword(s):

Phase Separation ◽

Low Temperature ◽

Analytical Method ◽

Salt Solutions ◽

Absolute Concentration ◽

Cooling Process ◽

X Ray ◽

The Absolute ◽

Analytical Procedures ◽

Electrical Conductors

Although sections of frozen salt solutions have been used as standards for x-ray microanalysis, such solutions are less useful when analysed in the bulk form. They are poor thermal and electrical conductors and severe phase separation occurs during the cooling process. Following a suggestion by Whitecross et al we have made up a series of salt solutions containing a small amount of graphite to improve the sample conductivity. In addition, we have incorporated a polymer to ensure the formation of microcrystalline ice and a consequent homogenity of salt dispersion within the frozen matrix. The mixtures have been used to standardize the analytical procedures applied to frozen hydrated bulk specimens based on the peak/background analytical method and to measure the absolute concentration of elements in developing roots.

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