Anisotropic Reactive Ion Etching of MoSi2 and In Situ Doped n+ and p+ Polysilicon Using Cl2 and BCl3
1988 ◽
Vol 135
(9)
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pp. 2373-2378
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2002 ◽
Vol 20
(1)
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pp. 154
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2013 ◽
Vol 110
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pp. 311-314
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Keyword(s):
1993 ◽
Vol 70-71
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pp. 613-618
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1990 ◽
Vol 8
(5)
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pp. 1044
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Keyword(s):
2000 ◽
Vol 18
(6)
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pp. 2785
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Keyword(s):
2004 ◽
Vol 17
(3)
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pp. 408-421
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Keyword(s):
1990 ◽
Vol 8
(3)
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pp. 516
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Keyword(s):