Influence of Oxygen Partial Pressure on Thickness Change of Buried Oxide in Silicon-on-Insulator Structure during High-Temperature Oxidation Processes

2006 ◽  
Vol 153 (12) ◽  
pp. G1078 ◽  
Author(s):  
Keisuke Kawamura ◽  
Teruaki Motooka
Keyword(s):  
High Temperature ◽  
Oxygen Partial Pressure ◽  
Partial Pressure ◽  
High Temperature Oxidation ◽  
Silicon On Insulator ◽  
Temperature Oxidation ◽  
Thickness Change ◽  
Oxidation Processes ◽  
Buried Oxide

High Temperature Oxidation of SiC under Helium with Low Oxygen Partial Pressure

2019 ◽  
Vol 25 (25) ◽  
pp. 123-131 ◽  
Author(s):  
Marianne Balat-Pichelin ◽  
Ludovic Charpentier ◽  
Fabienne Audubert
Keyword(s):  
High Temperature ◽  
Oxygen Partial Pressure ◽  
Partial Pressure ◽  
High Temperature Oxidation ◽  
Low Oxygen ◽  
Temperature Oxidation

A novel ultra-high temperature oxidation technique in flowing gas with controlled oxygen partial pressure

2010 ◽  
Vol 4 (3) ◽  
pp. 266-270 ◽  
Author(s):  
Jing-Jun Xu ◽  
Mei-Shuan Li ◽  
Xue-Liang Fang ◽  
Zhong-Wei Zhang ◽  
Zheng-Hui Xu ◽  
...  
Keyword(s):  
High Temperature ◽  
Oxygen Partial Pressure ◽  
Partial Pressure ◽  
High Temperature Oxidation ◽  
Temperature Oxidation ◽  
Ultra High Temperature

High Temperature Erosion-Corrosion in Gas Turbines

1982 ◽  
Author(s):  
J. Stringer
Keyword(s):  
High Temperature ◽  
Gas Turbines ◽  
High Temperature Oxidation ◽  
Metal Loss ◽  
Protective Oxide ◽  
Temperature Oxidation ◽  
Oxidation Processes ◽  
Erosion Corrosion ◽  
Burning Coal ◽  
High Temperature Erosion

Under certain circumstances, hot gases containing particulates may be expanded through a turbine. The erosion damage due to the particulates interacts with the high temperature oxidation processes. The interaction may be positive: the oxide layer may be more erosion-resistant than the substrate. The interaction may be negative: the erosion can remove the protective oxide resulting in accelerated metal loss. If the gases contain corrosive materials such as alkali sulfates as well as the particulates, further interactions are possible. These processes are of importance in gas turbine expanders for pressurized fluidized bed combustors burning coal, and several research projects are in progress to study them.

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