Fabrication of an Electro-Optical Temperature Sensor Based on Silicon Oxynitride Films Deposited by PECVD
2014 ◽
Vol 216
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pp. 312-317
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2015 ◽
Vol 3
(28)
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pp. 7379-7385
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Keyword(s):
2003 ◽
Vol 21
(3)
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pp. 805-814
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2012 ◽
Vol 285
(7)
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pp. 1925-1928
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