Regularization Algorithm for DOS Spectrum Deconvolution From C(V) and Q(V) Dependencies of Si Nanowire-Based MOS Structure

2019 ◽  
Vol 25 (10) ◽  
pp. 19-27
Author(s):  
Valeri Ligatchev ◽  
Sai Kong Chin





2003 ◽  
Vol 766 ◽  
Author(s):  
V. Ligatchev ◽  
T.K.S. Wong ◽  
T.K. Goh ◽  
Rusli Suzhu Yu

AbstractDefect spectrum N(E) of porous organic dielectric (POD) films is studied with capacitance deep-level-transient-spectroscopy (C-DLTS) in the energy range up to 0.7 eV below conduction band bottom Ec. The POD films were prepared by spin coating onto 200mm p-type (1 – 10 Δcm) single-side polished silicon substrates followed by baking at 325°C on a hot plate and curing at 425°C in furnace. The film thickness is in the 5000 – 6000 Å range. The ‘sandwich’ -type NiCr/POD/p-Si/NiCr test structures showed both rectifying DC current-voltage characteristics and linear 1/C2 vs. DC reverse bias voltage. These confirm the applicability of the C-DLTS technique for defect spectrum deconvolution and the n-type conductivity of the studied films. Isochronal annealing (30 min in argon or 60 min in nitrogen) has been performed over the temperature range 300°C - 650°C. The N(E) distribution is only slightly affected by annealing in argon. However, the distribution depends strongly on the annealing temperature in nitrogen ambient. A strong N(E) peak at Ec – E = 0.55 – 0.60 eV is detected in all samples annealed in argon but this peak is practically absent in samples annealed in nitrogen at Ta < 480°C. On the other hand, two new peaks at Ec – E = 0.12 and 0.20 eV appear in the N(E) spectrum of the samples annealed in nitrogen at Ta = 650°C. The different features of the defect spectrum are attributed to different interactions of argon and nitrogen with dangling carbon bonds on the intra-pore surfaces.



2013 ◽  
Vol 28 (11) ◽  
pp. 1207-1212 ◽  
Author(s):  
Jian-Wen LI ◽  
Ai-Jun ZHOU ◽  
Xing-Quan LIU ◽  
Jing-Ze LI


2019 ◽  
Vol 3 (8) ◽  
Author(s):  
Joost Ridderbos ◽  
Matthias Brauns ◽  
Ang Li ◽  
Erik P. A. M. Bakkers ◽  
Alexander Brinkman ◽  
...  


Coatings ◽  
2021 ◽  
Vol 11 (6) ◽  
pp. 685
Author(s):  
Ai-Huei Chiou ◽  
Jun-Luo Wei ◽  
Ssu-Han Chen

A novel surface-enhanced Raman scattering (SERS)-based probe to capture heavy metal ion (Zn2+) by bovine serum albumin (BSA) using Si-nanowire (SiNW) arrays with silver nanoparticles (AgNPs) was developed. A layer with AgNPs was deposited on the SiNW surface by RF magnetron sputtering for enhancement of SERS signals. Using a high-resolution transmission electron microscope (HRTEM), the observation reveals that the AgNP layer with depths of 30–75 nm was successfully deposited on SiNW arrays. The Ag peaks in EDS and XRD spectra of SiNW arrays confirmed the presence of Ag particles on SiNW arrays. The WCA observations showed a high affinity of the Ag–SiNW arrays immobilized with BSA (water contact angle (WCA) = 87.1°) and ZnSO4 (WCA = 8.8°). The results of FTIR analysis illustrate that the conjugate bonds exist between zinc sulfate (ZnSO4) and –OH groups/–NH groups of BSA. The resulting SiNWs/Ag NPs composite interfaces showed large Raman scattering enhancement for the capture of heavy metal ions by BSA with a detection of 0.1 μM. BSA and ZnSO4 conjugations, illustrating specific SERS spectra with high sensitivity, which suggests great promise in developing label-free biosensors.





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