Ion Bombardment during the Deposition of SiO[sub X] by AC-Biasing in a Remote-Type Atmospheric Pressure Plasma System

2011 ◽  
Vol 158 (3) ◽  
pp. G58 ◽  
Author(s):  
Elly Gil ◽  
Jae Beom Park ◽  
Jong Sik Oh ◽  
Myung S. Jhon ◽  
Geun Young Yeom
Keyword(s):  
Atmospheric Pressure ◽  
Atmospheric Pressure Plasma ◽  
Ion Bombardment ◽  
Plasma System ◽  
Pressure Plasma

Properties of Siloxane Coatings Deposited in a Reel-to-Reel Atmospheric Pressure Plasma System

2007 ◽  
Vol 4 (S1) ◽  
pp. S450-S454 ◽  
Author(s):  
Barry Twomey ◽  
Denis Dowling ◽  
Gerry Byrne ◽  
Liam O'Neill ◽  
Lesley-Ann O'Hare
Keyword(s):  
Atmospheric Pressure ◽  
Atmospheric Pressure Plasma ◽  
Plasma System ◽  
Pressure Plasma

Comparing Deposition Properties in an Atmospheric Pressure Plasma System Operating in Uniform and Nonuniform Modes

2009 ◽  
Vol 37 (6) ◽  
pp. 961-969 ◽  
Author(s):  
B. Twomey ◽  
D.P. Dowling ◽  
G. Byrne ◽  
W.G. Graham ◽  
L.F. Schaper ◽  
...  
Keyword(s):  
Atmospheric Pressure ◽  
Atmospheric Pressure Plasma ◽  
Plasma System ◽  
Pressure Plasma ◽  
System Operating
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