Mask Synthesis for Aerial Image Fidelity in Optical Lithography Using a Coarse-Grid-Approximation Level-Set Approach
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2007 ◽
Vol 225
(1)
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pp. 949-974
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2006 ◽
Vol 215
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pp. 98-132
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2007 ◽
Vol 221
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pp. 539-557
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2007 ◽
Vol 21
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pp. 1195-1212
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2007 ◽
Vol 558-559
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pp. 1133-1138
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