scholarly journals Low-Frequency Noise Assessment of Work Function Engineering Cap Layers in High-k Gate Stacks

2019 ◽  
Vol 8 (2) ◽  
pp. N25-N31 ◽  
Author(s):  
C. Claeys ◽  
R. Ritzenthaler ◽  
T. Schram ◽  
H. Arimura ◽  
N. Horiguchi ◽  
...  
Keyword(s):  
Work Function ◽  
Low Frequency ◽  
Frequency Noise ◽  
Low Frequency Noise ◽  
Gate Stacks ◽  
High K ◽  
Noise Assessment

Low-Frequency Noise Assessment of the Oxide Quality of Gate-Last High- $k$ pMOSFETs

2012 ◽  
Vol 33 (10) ◽  
pp. 1366-1368 ◽  
Author(s):  
E. Simoen ◽  
A. Veloso ◽  
N. Horiguchi ◽  
C. Claeys
Keyword(s):  
Low Frequency ◽  
Frequency Noise ◽  
Low Frequency Noise ◽  
High K ◽  
Noise Assessment

Investigation of low-frequency noise of 28-nm technology process of high-k/metal gate p-MOSFETs with fluorine incorporation

2016 ◽  
Vol 115 ◽  
pp. 7-11
Author(s):  
Tsung-Hsien Kao ◽  
Shoou-Jinn Chang ◽  
Yean-Kuen Fang ◽  
Po-Chin Huang ◽  
Bo-Chin Wang ◽  
...  
Keyword(s):  
Low Frequency ◽  
Frequency Noise ◽  
Low Frequency Noise ◽  
Metal Gate ◽  
High K ◽  
Technology Process ◽  
28 Nm

Improving Low-Frequency Noise in 14-nm FinFET by Optimized High-k/Metal Gate Thermal Processing

2021 ◽  
pp. 1-1
Author(s):  
Hao Zhu ◽  
Bin Ye ◽  
Chengkang Tang ◽  
Xianghui Li ◽  
Qingqing Sun ◽  
...  
Keyword(s):  
Thermal Processing ◽  
Low Frequency ◽  
Frequency Noise ◽  
Low Frequency Noise ◽  
Metal Gate ◽  
High K

Low-Frequency Noise Performance of HfO[sub 2]-Based Gate Stacks

2005 ◽  
Vol 152 (9) ◽  
pp. F115 ◽  
Author(s):  
C. Claeys ◽  
E. Simoen ◽  
A. Mercha ◽  
L. Pantisano ◽  
E. Young
Keyword(s):  
Low Frequency ◽  
Frequency Noise ◽  
Noise Performance ◽  
Low Frequency Noise ◽  
Gate Stacks

Low-Frequency Noise in Submicrometer MOSFETs With HfO<tex>$_2$</tex>, HfO<tex>$_2/hbox Al_2hbox O_3$</tex>and HfAlO<tex>$_x$</tex>Gate Stacks

2004 ◽  
Vol 51 (8) ◽  
pp. 1315-1322 ◽  
Author(s):  
B. Min ◽  
S.P. Devireddy ◽  
Z. Celik-Butler ◽  
F. Wang ◽  
A. Zlotnicka ◽  
...  
Keyword(s):  
Low Frequency ◽  
Frequency Noise ◽  
Low Frequency Noise ◽  
Gate Stacks

Low-Frequency Noise in Submicrometer MOSFETs With HfO<tex>$_2$</tex>, HfO<tex>$_2/hbox Al_2hbox O_3$</tex>and HfAlO<tex>$_x$</tex>Gate Stacks

2004 ◽  
Vol 51 (10) ◽  
pp. 1679-1687 ◽  
Author(s):  
B. Min ◽  
S.P. Devireddy ◽  
Z. Celik-Butler ◽  
F. Wang ◽  
A. Zlotnicka ◽  
...  
Keyword(s):  
Low Frequency ◽  
Frequency Noise ◽  
Low Frequency Noise ◽  
Gate Stacks

Low-Frequency Noise Investigation and Noise Variability Analysis in High- $k$/Metal Gate 32-nm CMOS Transistors

2011 ◽  
Vol 58 (8) ◽  
pp. 2310-2316 ◽  
Author(s):  
Diana Lopez ◽  
S. Haendler ◽  
C. Leyris ◽  
Gregory Bidal ◽  
Gérard Ghibaudo
Keyword(s):  
Low Frequency ◽  
Frequency Noise ◽  
Low Frequency Noise ◽  
Metal Gate ◽  
Variability Analysis ◽  
Cmos Transistors ◽  
High K
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