Plasma-Enhanced Atomic Layer Deposition for Compositionally Controlled
Metal Oxide Thin Films
Keyword(s):
2007 ◽
Vol 7
(11)
◽
pp. 3758-3764
2007 ◽
Vol 7
(11)
◽
pp. 3758-3764
◽
2018 ◽
Vol 71
(11-13)
◽
pp. 2043-2052
◽
Keyword(s):
2014 ◽
Vol 20
(7-8-9)
◽
pp. 189-208
◽
Keyword(s):
2010 ◽
Vol 157
(7)
◽
pp. P66
◽