An advanced Surface-Enhanced Raman Scattering (SERS) Nanosensor Array, dedicated to serve in the future as a pH imager for the real-time detection of chemical reaction, is presented. The full flow of elementary steps—architecture, design, simulations, fabrication, and preliminary experimental results of structural characterization (Focused Ion Beam (FIB), TEM and SEM)—show an advanced SERS pixel array that is capable of providing spatially resolved measurements of chemical pH in a fluid target that became more than desirable in this period. Ultimately, the goal will be to provide real-time monitoring of a chemical reaction. The pixels consist of a nanostructured substrate composed of an array of projections or cavities. The shape of the nanostructures and the thickness of the metallic (Ag or Au) layer can be tuned to give maximal enhancement at the desired wavelength. The number and arrangement of nanostructures is optimized to obtain maximal responsivity.
High performance surface-enhanced Raman scattering substrates of Si-based Au film developed by focused ion beam nanofabrication
