Low Temperature Processing of Si-based Dielectric Thin Films

2011 ◽  
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Dielectric Thin Films ◽  
Low Temperature Processing

Low Temperature Processing of Si-Based Dielectric Thin Films

2019 ◽  
Vol 35 (4) ◽  
pp. 241-257
Author(s):  
Pooran Joshi ◽  
A. Tolis Voutsas ◽  
John Hartzell
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Dielectric Thin Films ◽  
Low Temperature Processing

Low-Temperature Processing Using Triple Alkoxide Precursors for Layer-Structured Perovskite Thin Films: Preparation and Characterization of Mbi2Ta2O9 (M: Ca or Ba) Thin Films

1999 ◽  
Vol 596 ◽  
Author(s):  
K. Kato
Keyword(s):  
Crystal Structure ◽  
Thin Films ◽  
Electrical Properties ◽  
Low Temperature ◽  
Surface Topography ◽  
Annealing Temperature ◽  
Low Temperature Processing ◽  
Deposited Films ◽  
Alkoxide Precursors

AbstractCaBi2Ta2O9 and BaBi2Ta2O9 thin films were successfully prepared by using triple alkoxide precursors such as Ca[BiTa(OC2H5)9]2 and Ba[BiTa(OC2H5)9]2, respectively. As-deposited films were amorphous and crystallized below 500°C by rapid thermal annealing in oxygen. The crystallinity improved with annealing temperature. The development of the crystal structure and surface topography of the thin films were investigated. Additionally, some electrical properties were evaluated.

The low temperature processing for removal of metallic bismuth in ferroelectric SrBi2Ta2O9 thin films

1999 ◽  
Vol 140 (1-2) ◽  
pp. 150-155 ◽  
Author(s):  
Jae-Sun Kim ◽  
Cheol-Hoon Yang ◽  
Soon-Gil Yoon ◽  
Won-Youl Choi ◽  
Ho-Gi Kim
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Metallic Bismuth ◽  
Low Temperature Processing

New low temperature processing of sol-gel SrBi2Ta2O9 thin films

1997 ◽  
Vol 14 (1-4) ◽  
pp. 123-131 ◽  
Author(s):  
Yasuyuki Ito ◽  
Maho Ushikubo ◽  
Seiichi Yokoyama ◽  
Hironori Matsunaga ◽  
Tsutomu Atsuki ◽  
...  
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Sol Gel ◽  
Low Temperature Processing

Highly Crystalline Nanoparticle Suspensions for Low-Temperature Processing of TiO2 Thin Films

2016 ◽  
Vol 8 (20) ◽  
pp. 13027-13036 ◽  
Author(s):  
Jonathan Watté ◽  
Petra Lommens ◽  
Glenn Pollefeyt ◽  
Mieke Meire ◽  
Klaartje De Buysser ◽  
...  
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Tio2 Thin Films ◽  
Nanoparticle Suspensions ◽  
Low Temperature Processing
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