Low-Temperature Processing Using Triple Alkoxide Precursors for Layer-Structured Perovskite Thin Films: Preparation and Characterization of Mbi2Ta2O9 (M: Ca or Ba) Thin Films
Keyword(s):
AbstractCaBi2Ta2O9 and BaBi2Ta2O9 thin films were successfully prepared by using triple alkoxide precursors such as Ca[BiTa(OC2H5)9]2 and Ba[BiTa(OC2H5)9]2, respectively. As-deposited films were amorphous and crystallized below 500°C by rapid thermal annealing in oxygen. The crystallinity improved with annealing temperature. The development of the crystal structure and surface topography of the thin films were investigated. Additionally, some electrical properties were evaluated.
2010 ◽
Vol 10
(3)
◽
pp. S379-S382
◽
Keyword(s):
1991 ◽
Vol 49
◽
pp. 562-563
Keyword(s):
2013 ◽
Vol 74
(12)
◽
pp. 1672-1677
◽
2008 ◽
Vol 69
(2-3)
◽
pp. 475-479
◽
2015 ◽
Vol 41
(10)
◽
pp. 12980-12987
◽