Low-Temperature Processing Using Triple Alkoxide Precursors for Layer-Structured Perovskite Thin Films: Preparation and Characterization of Mbi2Ta2O9 (M: Ca or Ba) Thin Films

1999 ◽  
Vol 596 ◽  
Author(s):  
K. Kato

AbstractCaBi2Ta2O9 and BaBi2Ta2O9 thin films were successfully prepared by using triple alkoxide precursors such as Ca[BiTa(OC2H5)9]2 and Ba[BiTa(OC2H5)9]2, respectively. As-deposited films were amorphous and crystallized below 500°C by rapid thermal annealing in oxygen. The crystallinity improved with annealing temperature. The development of the crystal structure and surface topography of the thin films were investigated. Additionally, some electrical properties were evaluated.

2011 ◽  
Vol 383-390 ◽  
pp. 822-825
Author(s):  
Ping Luan ◽  
Jian Sheng Xie ◽  
Jin Hua Li

Using magnetron sputtering technology, the CuInSi thin films were prepared by multilayer synthesized method. The structure of CuInSi films were detected by X-ray diffraction(XRD), the main crystal phase peak is at 2θ=42.458°; The resistivity of films were measured by SDY-4 four-probe meter; The conductive type of the films were tested by DLY-2 conductivity type testing instrument. The results show that the annealing temperature and time effect on the crystal resistivity and crystal structure greatly.


2010 ◽  
Vol 10 (3) ◽  
pp. S379-S382 ◽  
Author(s):  
Mi Sun Park ◽  
Seung Yeol Han ◽  
Eun Jin Bae ◽  
Tae Jin Lee ◽  
Chih Hung Chang ◽  
...  

2007 ◽  
Vol 1010 ◽  
Author(s):  
XiaoXin Chen ◽  
Michael Sorenson ◽  
Clayton Butler ◽  
Loren Rieth ◽  
Mark S. Miller ◽  
...  

AbstractMicroscale (MEMS) gas sensing devices for power plant and automobile exhaust gas are being developed. Bulk BaZrO3 has been previously found to be sensitive to H2O at high temperatures, but was never studied in a thin film form. This research thrust focuses on undoped BaZrO3 and doped BaZrO3 with Y.Thin films were deposited on oxidized n-type silicon substrates at room temperature from ceramic targets with an Ar sputtering ambient. Various deposition pressures and deposition powers were used for the initial investigation. The structural and electrical properties of the deposited films were characterized to investigate their relationships to the deposition process parameters. X-ray diffraction (XRD) was used to measure the crystal structure of the deposited films, and in particular was used to determine if any crystallographic texture is present in the films. XRD results indicate the as-deposited films are amorphous before annealing. Films sputtered with and without oxygen in the ambient were compared. The crystal structure and morphology of BaZrO3 and BaZrO3 doped with Y after annealing were also determined. The materials changed from amorphous to crystalline after annealing at temperatures of 800 °C and 1000 °C for 3 hours in forming gas (2% H2 balanced with Ar gas) and oxygen. Temperature was found to dominate over deposition conditions in determining the final film structure. Atomic force microscopy was used to examine the morphology of the thin films. Gas sensor test structures using a Pt thin film metallization for interdigitated electrode structures were fabricated for gas sensing measurements. The experiments with the completed test structures measured the materials¡¦ resistivity as a function of temperature and gas concentration. Both materials decrease in resistance with increasing temperature, which is consistent with ionic conduction. Some experiments tested the gas sensitivity and selectivity of the films to the target gas H2O vapor (humidity) and possible cross sensitive gases H2 and CO2. Both materials need further development to evaluate their suitability for thin film sensors. First, the films were found to be highly resistive, making characterization of the electrical properties very difficult. Second, O2 ambient annealing gas will be applied to compare the crystal structure and morphology of both films with an Ar ambient annealing process.


2009 ◽  
Vol 1165 ◽  
Author(s):  
Nicolas Barreau ◽  
Mickael Tessier

AbstractThe crystalline, optical and electrical properties of In2S3 containing copper thin films are investigated. Increasing the amount of copper within the In2S3 crystalline matrix yields reduced bandgap value and hindered conductivity. The films investigated being synthesized at low temperature (200 °C), it is likely they have similar properties as the materials formed at the CuIn1-xGaxSe2/In2S3 interface.


Author(s):  
F.-R. Chen ◽  
T. L. Lee ◽  
L. J. Chen

YSi2-x thin films were grown by depositing the yttrium metal thin films on (111)Si substrate followed by a rapid thermal annealing (RTA) at 450 to 1100°C. The x value of the YSi2-x films ranges from 0 to 0.3. The (0001) plane of the YSi2-x films have an ideal zero lattice mismatch relative to (111)Si surface lattice. The YSi2 has the hexagonal AlB2 crystal structure. The orientation relationship with Si was determined from the diffraction pattern shown in figure 1(a) to be and . The diffraction pattern in figure 1(a) was taken from a specimen annealed at 500°C for 15 second. As the annealing temperature was increased to 600°C, superlattice diffraction spots appear at position as seen in figure 1(b) which may be due to vacancy ordering in the YSi2-x films. The ordered vacancies in YSi2-x form a mesh in Si plane suggested by a LEED experiment.


Author(s):  
Fouaz Lekoui ◽  
Salim Hassani ◽  
Mohammed Ouchabane ◽  
Hocine Akkari ◽  
Driss Dergham ◽  
...  

2013 ◽  
Vol 74 (12) ◽  
pp. 1672-1677 ◽  
Author(s):  
Y.J. Zhang ◽  
Z.T. Liu ◽  
D.Y. Zang ◽  
X.S. Che ◽  
L.P. Feng ◽  
...  

2002 ◽  
Vol 750 ◽  
Author(s):  
Yoshifumi Aoi ◽  
Kojiro Ono ◽  
Kunio Sakurada ◽  
Eiji Kamijo

ABSTRACTAmorphous CNx thin films were deposited by pulsed laser deposition (PLD) combined with a nitrogen rf radical beam source which supplies active nitrogen species to the growing film surface. The deposited films were characterized by X-ray photoelectron spectroscopy (XPS), Raman scattering, and Fourier transform infrared (FTIR) spectroscopy. Nitrogen content of the deposited films increased with increasing rf input power and N2 pressure in the PLD chamber. The maximum N/C ratio 0.23 was obtained at 400 W of rf input power and 1.3 Pa. XPS N 1s spectra shows the existence of several bonding structures in the deposited films. Electrical properties of the deposited films were investigated. The electrical conductivity decreased with increasing N/C atomic ratio. Temperature dependence of electrical conductivity measurements indicated that electronic conduction occurred by variable-range hopping between p electron localized states.


2008 ◽  
Vol 69 (2-3) ◽  
pp. 475-479 ◽  
Author(s):  
Chung-Han Wu ◽  
Mohammad Qureshi ◽  
Chung-Hsin Lu

2015 ◽  
Vol 41 (10) ◽  
pp. 12980-12987 ◽  
Author(s):  
Peng Li ◽  
Jiwei Zhai ◽  
Huarong Zeng ◽  
Kunyu Zhao ◽  
Bo Shen ◽  
...  

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