Growth and Characterization of Al0.2In0.1Ga0.7N on AIN/Sapphire Substrates by Rf-Magnetron Sputtering for Ultraviolet Light-Emitting Diodes

2013 ◽  
Keyword(s):  
Magnetron Sputtering ◽  
Ultraviolet Light ◽  
Light Emitting Diodes ◽  
Rf Magnetron Sputtering ◽  
Light Emitting ◽  
Sapphire Substrates ◽  
Ultraviolet Light Emitting Diodes

AlGaN-Based Deep Ultraviolet Light-Emitting Diodes Fabricated on Patterned Sapphire Substrates

2011 ◽  
Vol 4 (9) ◽  
pp. 092102 ◽  
Author(s):  
Myunghee Kim ◽  
Takehiko Fujita ◽  
Shinya Fukahori ◽  
Tetsuhiko Inazu ◽  
Cyril Pernot ◽  
...  
Keyword(s):  
Ultraviolet Light ◽  
Light Emitting Diodes ◽  
Light Emitting ◽  
Sapphire Substrates ◽  
Deep Ultraviolet ◽  
Ultraviolet Light Emitting Diodes ◽  
Patterned Sapphire Substrates
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