Amorphous Silicon Nitride Thin Film Anodes for Li-Ion Batteries

2016 ◽  
Keyword(s):  
Thin Film ◽  
Silicon Nitride ◽  
Amorphous Silicon ◽  
Li Ion Batteries ◽  
Amorphous Silicon Nitride ◽  
Li Ion

High-Rate Deposited Amorphous Silicon Nitride for the Hydrogenated Amorphous Silicon Thin-Film Transistor Structures

1996 ◽  
Vol 424 ◽  
Author(s):  
Tong Li ◽  
Chun-Ying Chen ◽  
Charles T. Malone ◽  
Jerzy Kanicki
Keyword(s):  
Thin Film ◽  
Silicon Nitride ◽  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
High Rate ◽  
Electrical Performance ◽  
Silicon Thin Film ◽  
Amorphous Silicon Nitride ◽  
Hydrogenated Amorphous ◽  
Low Rate

AbstractHydrogenated amorphous silicon nitride thin films, prepared in a large area plasma-enhanced chemical vapor (PECVD) deposition system utilizing high-rate deposition technique, have been characterized by various techniques. Experimental data obtained from this study are presented and compared to low-rate deposited PECVD films. Special attention has been devoted during this study to the difference between high- and low-rate deposited samples. The amorphous silicon (a-Si:H) thin-film transistors (TFTs) based on high-rate PECVD materials have been fabricated and characterized. The evaluation of a-Si:H TFTs indicates a good electrical performance which is comparable to its low-rate PECVD materials counterparts.

High stability amorphous-silicon–nitride thin-film diode ring switch

1998 ◽  
Vol 72 (1) ◽  
pp. 91-93 ◽  
Author(s):  
M. T. Johnson ◽  
G. Oversluizen ◽  
A. A. van der Put ◽  
W. H. M. Lodders
Keyword(s):  
Thin Film ◽  
Silicon Nitride ◽  
Amorphous Silicon ◽  
High Stability ◽  
Amorphous Silicon Nitride

scholarly journals Long-term Cyclability of Substoichiometric Silicon Nitride Thin Film Anodes for Li-ion Batteries

2017 ◽  
Vol 7 (1) ◽  
Author(s):  
Asbjørn Ulvestad ◽  
Hanne Flåten Andersen ◽  
Jan Petter Mæhlen ◽  
Øystein Prytz ◽  
Martin Kirkengen
Keyword(s):  
Thin Film ◽  
Silicon Nitride ◽  
Li Ion Batteries ◽  
Li Ion
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