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In-Situ Electrical Characterization of Low Temperature Getter Thin Films Activation
ECS Meeting Abstracts
◽
10.1149/ma2018-01/43/2486
◽
2018
◽
Keyword(s):
Thin Films
◽
Low Temperature
◽
Electrical Characterization
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References
In-Situ Electrical Characterization of Low Temperature Getter Thin Films Activation
ECS Meeting Abstracts
◽
10.1149/ma2018-02/57/2048
◽
2018
◽
Keyword(s):
Thin Films
◽
Low Temperature
◽
Electrical Characterization
Download Full-text
In-Situ Electrical Characterization of Low Temperature Getter Thin Films Activation
ECS Transactions
◽
10.1149/08616.0047ecst
◽
2018
◽
Vol 86
(16)
◽
pp. 47-53
Author(s):
Sylvain Lemettre
◽
Clément Bessouet
◽
Philippe Coste
◽
Helene Lecoq
◽
Thierry Sauvage
◽
...
Keyword(s):
Thin Films
◽
Low Temperature
◽
Electrical Characterization
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Low Temperature Formation of SiO2 Thin Films by Nitric Acid Oxidation of Si and Electrical Characterization of the Film
Hyomen Kagaku
◽
10.1380/jsssj.29.498
◽
2008
◽
Vol 29
(8)
◽
pp. 498-502
◽
Cited By ~ 1
Author(s):
Taketoshi MATSUMOTO
◽
Kentaro IMAMURA
◽
Hikaru KOBAYASHI
Keyword(s):
Thin Films
◽
Nitric Acid
◽
Low Temperature
◽
Electrical Characterization
◽
Acid Oxidation
◽
Nitric Acid Oxidation
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FT-IR, SIMS and electrical characterization of Si3N4 thin films obtained from CVD, assisted by in situ electrical discharge
Microelectronics Journal
◽
10.1016/0026-2692(93)90043-e
◽
1993
◽
Vol 24
(4)
◽
pp. 389-393
Author(s):
B. Balland
◽
R. Botton
◽
M. Lemiti
◽
J.C. Bureau
◽
A. Glachant
Keyword(s):
Thin Films
◽
Electrical Discharge
◽
Electrical Characterization
◽
Ft Ir
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Electrical characterization of in situ polymerized polyaniline thin films
Materials Science and Engineering B
◽
10.1016/j.mseb.2007.07.071
◽
2007
◽
Vol 143
(1-3)
◽
pp. 31-37
◽
Cited By ~ 10
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S.A. Travain
◽
G.F. Leal Ferreira
◽
J.A. Giacometti
◽
R.F. Bianchi
Keyword(s):
Thin Films
◽
Electrical Characterization
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Electrical characterization of junctions and bipolar transistors formed with in situ doped low-temperature (800 degrees C) epitaxial silicon
IEEE Transactions on Electron Devices
◽
10.1109/16.65746
◽
1991
◽
Vol 38
(1)
◽
pp. 128-134
Author(s):
S. Ohi
◽
W.R. Burger
◽
R. Reif
Keyword(s):
Low Temperature
◽
Electrical Characterization
◽
Bipolar Transistors
◽
Epitaxial Silicon
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In situ electrical characterization of dielectric thin films directly exposed to plasma vacuum-ultraviolet radiation
Journal of Applied Physics
◽
10.1063/1.1305836
◽
2000
◽
Vol 88
(4)
◽
pp. 1742-1746
◽
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Author(s):
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◽
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◽
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◽
Vacuum Ultraviolet
◽
Electrical Characterization
◽
Dielectric Thin Films
◽
Vacuum Ultraviolet Radiation
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Low temperature synthesis and optical and electrical characterization of ZnO thin films
Materials Today Proceedings
◽
10.1016/j.matpr.2018.06.530
◽
2018
◽
Vol 5
(10)
◽
pp. 21285-21291
Author(s):
B.R. Nagabushana
◽
M. Vishwas
Keyword(s):
Thin Films
◽
Low Temperature
◽
Electrical Characterization
◽
Zno Thin Films
◽
Low Temperature Synthesis
◽
Temperature Synthesis
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Synthesis and electrical characterization of low-temperature thermal-cured epoxy resin/functionalized silica hybrid-thin films for application as gate dielectrics
Thin Solid Films
◽
10.1016/j.tsf.2013.05.005
◽
2013
◽
Vol 539
◽
pp. 274-277
◽
Cited By ~ 1
Author(s):
Moonkyong Na
◽
Young Taec Kang
◽
Sang Cheol Kim
◽
Eun Dong Kim
Keyword(s):
Thin Films
◽
Low Temperature
◽
Epoxy Resin
◽
Gate Dielectrics
◽
Electrical Characterization
◽
Functionalized Silica
◽
Hybrid Thin Films
◽
Silica Hybrid
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In situ electrical characterization of YxTiy getter thin films during thermal activation
Journal of Physics Conference Series
◽
10.1088/1742-6596/1319/1/012012
◽
2019
◽
Vol 1319
◽
pp. 012012
Author(s):
C Bessouet
◽
S Lemettre
◽
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◽
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◽
Ch Renard
◽
...
Keyword(s):
Thin Films
◽
Thermal Activation
◽
Electrical Characterization
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